Exposures from Mask Aligner into Resist • Mask aligner images created by shadowing from mask into resist • Soft contact and
![Applied Sciences | Free Full-Text | Improved MSRN-Based Attention Block for Mask Alignment Mark Detection in Photolithography Applied Sciences | Free Full-Text | Improved MSRN-Based Attention Block for Mask Alignment Mark Detection in Photolithography](https://www.mdpi.com/applsci/applsci-12-02721/article_deploy/html/images/applsci-12-02721-g001.png)
Applied Sciences | Free Full-Text | Improved MSRN-Based Attention Block for Mask Alignment Mark Detection in Photolithography
![Schematic of the mask aligner for lab-scale exposure system, and the... | Download Scientific Diagram Schematic of the mask aligner for lab-scale exposure system, and the... | Download Scientific Diagram](https://www.researchgate.net/publication/316098194/figure/fig3/AS:669147771977737@1536548669507/Schematic-of-the-mask-aligner-for-lab-scale-exposure-system-and-the-alignment-process.png)